SPREADING RESISTANCE MODELING FOR CONTACT RESISTIVITY EXTRACTION IN OHMIC MULTILAYER STRUCTURES WITH CIRCULAR ELECTRODESIEEE Transactions on Electron DevicesPaperDeniz Turkay / Ergi Dönerçark / Konstantin Tsoi / Raşit Turan / Selçuk YERCİSPREADING RESISTANCE MODELING FOR CONTACT RESISTIVITY EXTRACTION IN OHMIC MULTILAYER STRUCTURES WITH CIRCULAR ELECTRODES