Description
Service Device/System: PECVD for dielectric (SixNy and SiOxNy) coating processes
₺100,000
Thicker than 200 nm; Priced over 20 wafers
SixNy and SiOxNy coating on Si surface
₺100,000
Thicker than 200 nm; Priced over 20 wafers
Service Device/System: PECVD for dielectric (SixNy and SiOxNy) coating processes