Service Device/System: PECVD for dielectric (SixNy and SiOxNy) coating processes
₺150,000
Thinner than 100 nm; Priced over 20 wafers
₺150,000
Thinner than 100 nm; Priced over 20 wafers
Service Device/System: PECVD for dielectric (SixNy and SiOxNy) coating processes