Characterization of N Rich-Silicon Nitride Thin Films Deposited by PECVD
Yazar Adı
I. Güler
I. Güler
Yayın Tarihi
26.04.2023
26.04.2023
DOI Numarası
10.1149/2162-8777/acc971
10.1149/2162-8777/acc971
Dergi Adı
ECS Journal of Solid State Science and Technology
ECS Journal of Solid State Science and Technology