Characterization of N Rich-Silicon Nitride Thin Films Deposited by PECVD
Author Name
I. Güler
I. Güler
Publication Date
26.04.2023
26.04.2023
DOI Number
10.1149/2162-8777/acc971
10.1149/2162-8777/acc971
Journal Name
ECS Journal of Solid State Science and Technology
ECS Journal of Solid State Science and Technology