Development of a selective wet-chemical etchant for precise 3D sculpting of silicon enabled by infrared non-linear laser modification
Yazar Adı
Hisham Nasser, Raşit Turan, Ihor Pavlov, Alpan Bek
Hisham Nasser, Raşit Turan, Ihor Pavlov, Alpan Bek
Yayın Tarihi
10.04.2024
10.04.2024
DOI Numarası
10.1016/j.optlastec.2024.111022
10.1016/j.optlastec.2024.111022
Dergi Adı
Optics and Laser Technology
Optics and Laser Technology