Development of a selective wet-chemical etchant for precise 3D sculpting of silicon enabled by infrared non-linear laser modification
Author Name
Hisham Nasser, Raşit Turan, Ihor Pavlov, Alpan Bek
Hisham Nasser, Raşit Turan, Ihor Pavlov, Alpan Bek
Publication Date
10.04.2024
10.04.2024
DOI Number
10.1016/j.optlastec.2024.111022
10.1016/j.optlastec.2024.111022
Journal Name
Optics and Laser Technology
Optics and Laser Technology